·整合的离子源，便于RGA和SNMS

·各类型样品的快速转向

·阴、阳离子、中性粒子、自由基的质量、能量分析仪

·整合的离子枪光栅控制和信号选通，进行深度分析
·绝缘体研究中的电子流枪用于电荷中和
·液氮冷井和真空室烘烤加热器
·自动的SIMS 离子光学透镜调谐和质量数列表，使SIMS性能最佳

·Hiden EQS SIMS 分析仪，运行于 MASsoft O/S 之下，检测限至ppb级

·基本的激发源选择： 带差式泵的Hiden IG20 Ion，IFG200 FAB或高性能液态镓枪
·快速样品传递，样品固定，负载锁定的操纵器
·4 轴：X, Y, Z, θ UHV 操纵器，以最佳定位样品
·加上ESM LabVIEW和SIMS 成像程序，进行SIMS元素成像
·静态SIMS谱图库可用

Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB)

SIMS Brochure TI 181 (670 KB)

SIMS Brochure TI 181 HiRes (5.64 MB)

Tour of the Hiden SIMS Workstation (6.22 MB)

Instruments for diagnostics and analysis of thin films

Analysis of Metal-Polymer Interfaces in Thin Film Capacitors by Dynamic Quadrupole SIMS (380 KB)

Analysis of MOCVD-Grown GaInP/Ga(ln)As/Ge Triple Junction Solar Cells by SIMS (182 KB)

Combined SIMS SNMS Poster (1.08 MB)

High Performance SIMS - Mass and Energy Analyser for SIMS - A2 (584 KB)

High Performance SIMS - Mass and Energy Analyser for SIMS - A3 (339 KB)

Simultaneous SIMS and Electron Impact SNMS (347 KB)