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ESPion高级朗缪尔探针(Advanced Langmuir Probes for Electrical Plasma Characterisation)可快速、可靠、精确地进行等离子体诊断,是最先进可靠的Langmuir探针。
·Hiden在被动射频补偿方面处于领先地位,在所有的商业化探针中 ESPion具有最高的屏蔽阻抗(4.25Mohm at 13.56 MHz cf. 100kohm)
·获得数据速度: 15scans/s, ·通过D-O-E-界面可以自动/半自动/手动分析 ·90°探针,组合式线性-旋转驱动器可选 ·ESPsoft 包括所有必需的标准脉冲选通电路 ·自清洗循环,防止探针尖端污染 ESPION Series - Advanced Langmuir Probes for Plasma Diagnostics (311 KB) Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB) AP0067 - O- Density Measurements in the Pulsed-DC Reactive Magnetron Sputtering of Titanium (215 KB) AP0142 - Ion Density Increase in High Power Twin-cathode Magnetron System (247 KB) Energy/Mass Spectrometer Analyser and Langmuir Probe Diagnostics for HIPIMS (1.88 MB) Mass Spectrometry in HiPIMS Plasmas - COST Workshop 2012 (3.2 MB)
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