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PSM是一台差式泵质谱仪(In-Line Plasma Analysers for Neutrals, Radicals and Ion Analysis),分析等离子过程中的二次离子和中性粒子。
·差式泵歧管,通过法兰与过程反应室连接 ·电子附着选件,具有可调谐的离子源,用于表观电势MS
·灵敏度高 / 极稳定的3级过滤四极杆 ·质量数范围: 0 ~ 2500amu ·脉冲离子计数检测器,7个数量级的动态范围 ·Mu-Metal, Radio-metal屏蔽可选, 高压操作可选
Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB) Mass Analysis of CF3I Decomposition in a Surface Barrier Discharge - GEC 2011 (2.8 MB) Mass Spectroscopy of Metastable Species during Plasma Processing - GEC 2011 (2.1 MB) Time Resolved Ionisation Studies of HIPIMS - PSE 2006 (848 KB) Mass Spectrometry in HiPIMS Plasmas - COST Workshop 2012 (3.2 MB) |