The Hiden HPR-20 EPIC gas analysis system is configured for continuous analysis of gases and vapours at pressures near atmosphere in standard form, alternative inlet systems being offered for applications requiring direct sampling from higher pressures to 30 bar.

A sealed package gas analyser with integral package cracker for lamp gas analysis.

初期主要应用于半导体行业的特气检测，如毒性气体AsH3、B2H6、PH3等，强腐蚀性气体如如HCI、HF、CIF3等，强氧化性气体如CIF3、NF3等。 HPR-80腐蚀性气体分析质谱仪非常适用于分析腐蚀性气体，HF，HCl，HBr和卤代烃气体工艺产生的反应产物。

A system for discrete low volume sample analysis.

Software for evolved gas analysis.

Software for mass spectrometer control.