品牌：Hiden 型号：TOF-qSIMS 制造商：Hiden Analytical Ltd 产地： 英国

The IG20 features a high brightness electron impact gas ion source which is designed specifically for oxygen capability but is also suitable for use with inert and other gases.

The IG5C features a low power, high brightness, surface ionisation source coupled to a compact ion column, providing high performance in a small package.

The Hiden MAXIM quadrupole SIMS analyser is a state of the art secondary ion mass spectrometer for positive and negative, static, dynamic and neutral analytical applications.

EQS 是差式泵式二次离子质谱（SIMS-Secondary Ion Mass Spectrometer ‘Bolt-On’ probe），可分析来自固体样品的二次阴、阳离子和中性粒子。采用最新技术的SIMS 探针，便于连结到现有的UHV表面科学研究反应室。

Hiden SIMS二次离子质谱工作站提供高性能静态和动态 SIMS 分析，用于的表面成份分析和深度剖析。