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TPD 工作站配备多端口 UHV 室,配有加热样品台,与高精度三重过滤质谱仪相结合,配有脉冲离子计数检测器,可实现超过灵敏度和时间分辨率。
The IMP-EPD is a differentially pumped, ruggedised secondary ion mass spectrometer for the analysis of secondary ions and neutrals from the ion beam etch process.
Hiden’s XBS system provides in-situ monitoring of multiple sources with real-time signal output for precise control of the deposition.